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詳情介紹:
此款位移傳感器為nm級(jí)別光學(xué)位移傳感器,分辨率可達(dá)10nm,測(cè)量范圍100um.不同于常用的電容式位移傳感器,由于其采用光學(xué)設(shè)計(jì),具有對(duì)電磁**,可用于復(fù)雜的強(qiáng)電磁環(huán)境中。由于采用多種技術(shù),使其靈敏度達(dá)到干涉儀級(jí)別。
具有如下特色:
1.對(duì)溫度變化不敏感。
2.對(duì)電場(chǎng),磁場(chǎng)及電磁輻射**。
3.具有大的可測(cè)范圍,對(duì)傳感器定位精度要求不高。
4.具有高的測(cè)量帶寬,適合于振動(dòng)分析及高速測(cè)量。
5.具有小的測(cè)試區(qū)域。測(cè)試點(diǎn)大小可為30um~400um的測(cè)試光斑。
可應(yīng)用于如下各場(chǎng)合:
1.定位控制。
2.振動(dòng)測(cè)試。
3.離軸測(cè)量。
4.表面特性測(cè)試。
5.薄膜或涂層的厚度測(cè)量。
Important Notice
Performance figures, data and any illustrative material provided in this data sheet are typical and must be specifically confirmed in writing by F-tone Networks before they become applicable to any particular order or contract. In accordance with the F-tone Networks policy of continuous improvement specifications may change without notice.
The publication of information in this data sheet does not imply freedom from patent or other protective rights of F-tone Networks or others. Further details are available from any F-tone Networks sales representative.